J. M. Melzak

Evaluation of MEMS materials of construction for implantable medical devices

Geoffrey Kotzar, Mark Freas, Phillip B. Abel et al. · Biomaterials · 2002 · 433 citations

Engineering, Biomedical Engineering, Materials Science +14

Deposition of Polycrystalline 3C-SiC Films on 100 mm Diameter Si(100) Wafers in a Large-Volume LPCVD Furnace

Christian A. Zorman, Srihari Rajgopal, Xiaoxu Fu et al. · Electrochemical and Solid-State Letters · 2002 · 71 citations

Natural Sciences, Materials Engineering, Materials Science +17

Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining

Xiao Song, Srihari Rajgopal, J. M. Melzak et al. · Materials science forum · 2002 · 24 citations · Full text

Engineering, Materials Engineering, Materials Science +16

Silicon carbide for RF MEMS

J. M. Melzak · 2003 · 21 citations

Engineering, Electrical Engineering, Materials Science +17

Deposition and Characterization of In-Situ Boron Doped Polycrystalline Silicon Films for Microelectromechanical Systems Applications

J. J. McMahon, J. J. McMahon, J. M. Melzak et al. · MRS Proceedings · 1999 · 10 citations

Engineering, Materials Engineering, Materials Science +12