Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining - Concepedia

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Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining

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References

2002

Year

Xiao Song, Srihari Rajgopal, J. M. Melzak, Christian A. Zorman, Mehran Mehregany

Materials science forum

Materials ScienceWafer Scale ProcessingEngineeringMicromachinesMicrofabricationDesign Rules ComparableMicroelectronicsSurface ProcessingMicrostructure

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