Shigeo Yasuhara

Impact of film structure on damage to low-<i>k</i>SiOCH film during plasma exposure

Shigeo Yasuhara, Juhyun Chung, Kunitoshi Tajima et al. · Journal of Physics D Applied Physics · 2009 · 26 citations

Materials Science, Film Structure, Plasma Electronics +15

Structure-designable method to form super low-<i>k</i>SiOC film (<i>k</i>= 2.2) by neutral-beam-enhanced chemical vapour deposition

Shigeo Yasuhara, Juhyun Chung, Kunitoshi Tajima et al. · Journal of Physics D Applied Physics · 2009 · 22 citations

Materials Science, Chemical Engineering, Dielectric Constant +15

Super-low-k SiOCH film (k = 1.9) with extremely high water resistance and thermal stability formed by neutral-beam-enhanced CVD

Shigeo Yasuhara, Toru Sasaki, Tsutomu Shimayama et al. · Journal of Physics D Applied Physics · 2010 · 19 citations

Optical Materials, Engineering, Optoelectronic Devices +18

Reactive Force Field Molecular Dynamics Studies of the Initial Growth of Boron Nitride Using BCl₃ and NH₃ by Atomic Layer Deposition

Naoya Uene, Takuya Mabuchi, Masaru Zaitsu et al. · The Journal of Physical Chemistry C · 2024 · 12 citations

Impact of hot wire and material gas species on the Cat-CVD coating of gas barrier SiOC thin films onto PET bottles

Masaki Nakaya, Shigeo Yasuhara, Tomoki Maeda et al. · Surface and Coatings Technology · 2018 · 10 citations

Materials Science, Thermal Spray Coating, Engineering +9