Concepedia

Kunitoshi Tajima

KT

3

Publications

67

Citations

3

H-Index

2009

Active since

Affiliations

Tohoku University(Current)

Kunitoshi Tajima is an author at Tohoku University specializing in thin films, surface science, and applied physics.

Top concepts

Thin FilmsEngineeringApplied PhysicsSurface ScienceMaterial ScienceOptoelectronic DevicesPhysicsPlasma PhysicsOptical MaterialsElectronic Devices

Publications per year

2009–2010

3

Publications

3

Impact of film structure on damage to low-<i>k</i>SiOCH film during plasma exposure

Shigeo Yasuhara, Juhyun Chung, Kunitoshi Tajima et al. · Journal of Physics D Applied Physics · 2009 · 26 citations

Materials Science, Film Structure, Plasma Electronics +15

Structure-designable method to form super low-<i>k</i>SiOC film (<i>k</i>= 2.2) by neutral-beam-enhanced chemical vapour deposition

Shigeo Yasuhara, Juhyun Chung, Kunitoshi Tajima et al. · Journal of Physics D Applied Physics · 2009 · 22 citations

Materials Science, Chemical Engineering, Dielectric Constant +15

Super-low-k SiOCH film (k = 1.9) with extremely high water resistance and thermal stability formed by neutral-beam-enhanced CVD

Shigeo Yasuhara, Toru Sasaki, Tsutomu Shimayama et al. · Journal of Physics D Applied Physics · 2010 · 19 citations

Optical Materials, Engineering, Optoelectronic Devices +18

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