Masaru Zaitsu

Atomic layer etching of SiO2 by alternating an O2 plasma with fluorocarbon film deposition

Takayoshi Tsutsumi, Hiroki Kondo, Masaru Hori et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 54 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Experimental demonstration of self-aligned InP/InGaAsP polarization converter for polarization multiplexed photonic integrated circuits

Masaru Zaitsu, Takuo Tanemura, Akio Higo et al. · Optics Express · 2013 · 41 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Monolithic InP 100-port photonic switch

İbrahim Murat Soğancı, Takuo Tanemura, Koji Takeda et al. · 2010 · 26 citations

Engineering, Electrical Engineering, Optical Materials +16

Proposal and experimental demonstration of monolithic InP/InGaAsP polarization modulator

Yuto Kawabata, Masaru Zaitsu, Takuo Tanemura et al. · 2014 · 15 citations

Engineering, Electrical Engineering, Materials Science +17

Reactive Force Field Molecular Dynamics Studies of the Initial Growth of Boron Nitride Using BCl₃ and NH₃ by Atomic Layer Deposition

Naoya Uene, Takuya Mabuchi, Masaru Zaitsu et al. · The Journal of Physical Chemistry C · 2024 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +17