Concepedia
Statistics
Publications
2
Citations
42
H-Index
Active since
2005
Affiliations
Philips (France)(Current)
Laboratoire d'Électronique des Technologies de l'Information
STMicroelectronics (France)
Commissariat à l'Énergie Atomique et aux Énergies Alternatives
Jean-Christophe Urbani is an author at Philips (France) specializing in engineering, optoelectronics, and electrical engineering.
Publications per year
2005–2005
Improving model-based OPC performance for the 65-nm node through calibration set optimization
Kyle Patterson, Yorick Trouiller, Kevin Lucas et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 29 citations
Engineering, Electrical Engineering, Materials Science +10
High accuracy 65nm OPC verification: full process window model vs. critical failure ORC
Amandine Borjon, Jérôme Belledent, Shumay Shang et al. · Optical Microlithography XVIII · 2005 · 13 citations
Engineering, Manufacturing Engineering, Digital Fabrication +12
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