David Chao

Zone-plate-array lithography: A low-cost complement or competitor to scanning-electron-beam lithography

Henry I. Smith, Rajesh Menon, Amil Patel et al. · Microelectronic Engineering · 2006 · 50 citations

Wafer Scale Processing, Engineering, Zone-plate-array Lithography +8

Immersion zone-plate-array lithography

David Chao, Amil Patel, Tymon Barwicz et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 34 citations

Engineering, Beam Lithography, Immersion Zone-plate-array Lithography +10

Optical Arbitrary Waveform Generation

Erich P. Ippen, Andrew Benedick, Jonathan R. Birge et al. · 2010 · 29 citations

Engineering, Laser Science, Wave Optic +17

Zone-plate-array lithography (ZPAL): optical maskless lithography for cost-effective patterning

Rajesh Menon, Amil Patel, David Chao et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 17 citations

Optical Materials, Engineering, Electron-beam Lithography +22

High-density Er-implanted GaN optical memory devices

Boon K. Lee, Robert Chih-Jen, David Chao et al. · Applied Optics · 2001 · 16 citations

Photonics, Electrical Engineering, Optical Memory +14