Concepedia

Amil Patel

AP

9

Publications

344

Citations

9

H-Index

2004

Active since

Affiliations

Massachusetts Institute of Technology(Current)

Nanyang Technological University

LumArray (United States)

Amil Patel is an author at Massachusetts Institute of Technology specializing in engineering, applied physics, and microfabrication.

Top concepts

EngineeringApplied PhysicsMicrofabricationMicroscopyPhotonicsNanolithographyNanotechnologyOptical SystemsOptical MaterialsOptical Components

Publications per year

2004–2009

9

Publications

9

Maskless lithography

Rajesh Menon, Amil Patel, Henry I. Smith · Materials Today · 2005 · 131 citations · Full text

Zone-plate-array Lithography, Engineering, Electron-beam Lithography +15

Zone-plate-array lithography: A low-cost complement or competitor to scanning-electron-beam lithography

Henry I. Smith, Rajesh Menon, Amil Patel et al. · Microelectronic Engineering · 2006 · 50 citations

Wafer Scale Processing, Engineering, Zone-plate-array Lithography +8

Poisson’s spot with molecules

Thomas Reisinger, Amil Patel, Herbert Reingruber et al. · Physical Review A · 2009 · 45 citations · Full text

Engineering, Physics, Microscopy +15

Immersion zone-plate-array lithography

David Chao, Amil Patel, Tymon Barwicz et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 34 citations

Engineering, Beam Lithography, Immersion Zone-plate-array Lithography +10

Alpha-prototype system for zone-plate-array lithography

Rajesh Menon, Amil Patel, Euclid E. Moon et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 21 citations

Optical Design, Optical Materials, Engineering +24

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