LumArray (United States)

Zone-plate-array lithography: A low-cost complement or competitor to scanning-electron-beam lithography

Henry I. Smith, Rajesh Menon, Amil Patel et al. · Microelectronic Engineering · 2006 · 50 citations

Wafer Scale Processing, Engineering, Zone-plate-array Lithography +8

Large‐Area 3D Nanostructures with Octagonal Quasicrystalline Symmetry via Phase‐Mask Lithography

Ion Bita, Taeyi Choi, Michael Walsh et al. · Advanced Materials · 2007 · 49 citations · Full text

Inverse design of high-NA metalens for maskless lithography

Feng Zhang, Hao Li, Owen D. Miller et al. · Nanophotonics · 2023 · 23 citations · Full text

Engineering, Electron-beam Lithography, Microscopy +17

Fabrication of spiral-phase diffractive elements using scanning-electron-beam lithography

Hsin-Yu Tsai, Henry I. Smith, Rajesh Menon · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 22 citations

Optical Materials, Engineering, Electron-beam Lithography +16

A high-performance, metallodielectric 2D photonic crystal for thermophotovoltaics

Reyu Sakakibara, Veronika Stelmakh, Walker R. Chan et al. · Solar Energy Materials and Solar Cells · 2022 · 21 citations · Full text

Materials Science, Ii-vi Semiconductor, Engineering +3