Statistics
Publications
8
Citations
168
H-Index
8
Active since
2008
Andrey Nikipelov is an author at ASML (Netherlands) specializing in plasma physics, physics, and high-temperature plasmas.
Publications per year
2008–2023
8
8
EUV-induced hydrogen plasma and particle release
Mark van de Kerkhof, Andrei M. Yakunin, Vladimir Kvon et al. · Radiation effects and defects in solids · 2022 · 34 citations · Full text
Advanced particle contamination control in EUV scanners
Mark van de Kerkhof, Tjarko van Empel, Michael J. Lercel et al. · 2019 · 30 citations
Engineering, Manufacturing Engineering, Digital Fabrication +10
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