Michael J. Lercel

Sub-10 nm lithography with self-assembled monolayers

Michael J. Lercel, H. G. Craighead, Atul N. Parikh et al. · Applied Physics Letters · 1996 · 195 citations

Engineering, Electron-beam Lithography, Microscopy +17

Self-assembled monolayer electron beam resist on GaAs

R. C. Tiberio, H. G. Craighead, Michael J. Lercel et al. · Applied Physics Letters · 1993 · 134 citations

Semiconductors, Materials Science, Engineering +12

Self-assembled monolayer electron-beam resists on GaAs and SiO2

Michael J. Lercel, R. C. Tiberio, P. F. Chapman et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 130 citations

Sio2 Act, Engineering, Electron-beam Lithography +16

Electron-Beam-Induced Damage in Self-Assembled Monolayers

Kannan Seshadri, K. D. Froyd, Atul N. Parikh et al. · The Journal of Physical Chemistry · 1996 · 115 citations

Engineering, Electron-beam Lithography, Lithographic Patterning +16

Electron beam lithography with monolayers of alkylthiols and alkylsiloxanes

Michael J. Lercel, G. F. Redinbo, F. Pardo et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 96 citations

Engineering, Self-assembled Monolayers, Electron-beam Lithography +20