12
Publications
1K
Citations
12
H-Index
1996
Active since
Kannan Seshadri is an author at Pennsylvania State University specializing in engineering, surface science, and applied physics.
Top concepts
EngineeringApplied PhysicsSurface ScienceMaterial ScienceNanotechnologyNanofabricationMicrofabricationElectronic MaterialsChemistryOptoelectronic Devices
Publications per year
1996–2009
12
12
Atul N. Parikh, M. A. Schivley, Eunhae Koo et al. · Journal of the American Chemical Society · 1997 · 291 citations
Supramolecular Assembly, Engineering, Molecular Self-assembly +20
Sub-10 nm lithography with self-assembled monolayers
Michael J. Lercel, H. G. Craighead, Atul N. Parikh et al. · Applied Physics Letters · 1996 · 195 citations
High-resolution silicon patterning with self-assembled monolayer resists
Michael J. Lercel, C.S. Whelan, H. G. Craighead et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 53 citations
Engineering, Polycrystalline Silicon Films, Pattern Transfer +19
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