Statistics
Publications
1
Citations
30
H-Index
1
Active since
2019
Affiliations
ASML (Netherlands)(Current)
Tjarko van Empel is an author at ASML (Netherlands) specializing in reticle design, digital fabrication, and fine particle control.
Publications per year
2019–2019
1
1
Advanced particle contamination control in EUV scanners
Mark van de Kerkhof, Tjarko van Empel, Michael J. Lercel et al. · 2019 · 30 citations
Engineering, Manufacturing Engineering, Digital Fabrication +10
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