Concepedia
Statistics
Publications
16
Citations
442
H-Index
13
Active since
2003
Affiliations
Komatsu (Japan)(Current)
Heriot-Watt University
Krzysztof M. Nowak is an author at Komatsu (Japan) specializing in photonics, laser physics, and laser optics.
Publications per year
2003–2017
Efficient laser polishing of silica micro-optic components
Krzysztof M. Nowak, Howard J. Baker, D. R. Hall · Applied Optics · 2006 · 84 citations
Engineering, Materials Engineering, Materials Science +17
Analytical model for CO_2 laser ablation of fused quartz
Krzysztof M. Nowak, Howard J. Baker, D. R. Hall · Applied Optics · 2015 · 47 citations
Performance of one hundred watt HVM LPP-EUV source
Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 46 citations
Natural Sciences, Electrical Engineering, Physics +8
100W 1st generation laser-produced plasma light source system for HVM EUV lithography
Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 38 citations
Natural Sciences, Physics, Optoelectronics +9
LPP-EUV light source development for high volume manufacturing lithography
Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 32 citations
Natural Sciences, Materials Science, Physics +12
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