Wilfried Frank

<title>Ion beam and plasma jet etching for optical component fabrication</title>

Axel Schindler, Thomas Haensel, D. Flamm et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 38 citations

Engineering, Manufacturing Engineering, Materials Engineering +14

<title>Precision optical asphere fabrication by plasma jet chemical etching (PJCE) and ion beam figuring</title>

Axel Schindler, Georg Boehm, Thomas Haensel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 26 citations

Engineering, Manufacturing Engineering, Materials Engineering +12

Metrological characterization of nanometer film thickness standards for XRR and ellipsometry applications

Klaus Hasche, Peter Thomsen-Schmidt, Michael Krumrey et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +13