Georg Boehm

Statistics

Publications

Citations

162

H-Index

Active since

2001

Affiliations

Leibniz Institute of Surface Engineering(Current)

Technische Universität Dresden

Georg Boehm is an author at Leibniz Institute of Surface Engineering specializing in plasma-surface interactions, etching processes, and materials engineering.

Publications per year

2001–2020

Publications

Plasma Jet Machining

Thomas Arnold, Georg Boehm, Inga‐Maria Eichentopf et al. · Vakuum in Forschung und Praxis · 2010 · 46 citations

Engineering, Materials Engineering, Materials Science +14

<title>Ion beam and plasma jet etching for optical component fabrication</title>

Axel Schindler, Thomas Haensel, D. Flamm et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 38 citations

Engineering, Manufacturing Engineering, Materials Engineering +14

<title>Precision optical asphere fabrication by plasma jet chemical etching (PJCE) and ion beam figuring</title>

Axel Schindler, Georg Boehm, Thomas Haensel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 26 citations

Engineering, Manufacturing Engineering, Materials Engineering +12

An investigation on effectiveness of temperature treatment for fluorine‐based reactive plasma jet machining of N‐BK7®

Faezeh Kazemi, Georg Boehm, Thomas Arnold · Plasma Processes and Polymers · 2020 · 18 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Etch Mechanism and Temperature Regimes of an Atmospheric Pressure Chlorine-Based Plasma Jet Process

Peter M. Piechulla, Jens Bauer, Georg Boehm et al. · Plasma Processes and Polymers · 2016 · 17 citations

Natural Sciences, Materials Engineering, Materials Science +17

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