Alex Flamholz

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Active since

1997

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

Alex Flamholz is an author at IBM Research - Thomas J. Watson Research Center specializing in x-ray lithography, critical dimension control, and engineering.

Publications per year

1997–1999

Publications

X-ray lithography for ⩽100 nm ground rules in complex patterns

Scott D. Hector, Victor Pol, Azalia A. Krasnoperova et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 19 citations

Engineering, Materials Engineering, Digital Fabrication +14

Imaging capabilities of proximity x-ray lithography at 70-nm ground rules

Azalia A. Krasnoperova, R. Rippstein, Alex Flamholz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 13 citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

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