Chih-Ming Sun

Implementation of a Monolithic Single Proof-Mass Tri-Axis Accelerometer Using CMOS-MEMS Technique

Chih-Ming Sun, Ming‐Han Tsai, Yu‐Chia Liu et al. · IEEE Transactions on Electron Devices · 2010 · 87 citations

Engineering, Measurement, Accelerometer +17

Design and application of a metal wet-etching post-process for the improvement of CMOS-MEMS capacitive sensors

Ming‐Han Tsai, Chih-Ming Sun, Yu‐Chia Liu et al. · Journal of Micromechanics and Microengineering · 2009 · 62 citations

Engineering, Cmos-mems Capacitive Sensors, Microelectromechanical Systems +19

Performance enhance of CMOS-MEMS thermoelectric infrared sensor by using sensing material and structure design

Ting-Wei Shen, Kai-Chieh Chang, Chih-Ming Sun et al. · Journal of Micromechanics and Microengineering · 2018 · 47 citations

Engineering, Thermoelectrics, Micro-electromechanical System +27

Development of a CMOS-Based Capacitive Tactile Sensor With Adjustable Sensing Range and Sensitivity Using Polymer Fill-In

Yu‐Chia Liu, Chih-Ming Sun, Li-Yuan Lin et al. · Journal of Microelectromechanical Systems · 2010 · 45 citations

Engineering, Smart Polymer, Responsive Polymers +19

On the sensitivity improvement of CMOS capacitive accelerometer

Chih-Ming Sun, ChuanWei Wang, Weileun Fang · Sensors and Actuators A Physical · 2007 · 44 citations

Sensor Calibration, Engineering, Measurement +8