Concepedia
Statistics
Publications
55
Citations
1.4K
H-Index
23
Active since
1981
Affiliations
Hiroshima University(Current)
University of Tsukuba
Nagano Prefectural College
Shinshu University
Shin Yokoyama is an author at Hiroshima University specializing in materials science, natural sciences, and materials engineering.
Publications per year
1981–2016
Atomic layer controlled deposition of silicon nitride with self-limiting mechanism
Hiroshi Goto, Kentaro Shibahara, Shin Yokoyama · Applied Physics Letters · 1996 · 91 citations
Natural Sciences, Materials Engineering, Materials Science +17
Detection of antibody-antigen reaction by silicon nitride slot-ring biosensors using protein G
Tomoya Taniguchi, Anna Hirowatari, Takeshi Ikeda et al. · Optics Communications · 2015 · 68 citations
Life Sciences, Biotechnology, Immunology +14
Atomic layer controlled deposition of silicon nitride and in situ growth observation by infrared reflection absorption spectroscopy
Shin Yokoyama, Hiroshi Goto, Takahiro Miyamoto et al. · Applied Surface Science · 1997 · 57 citations
Low-temperature formation of silicon nitride gate dielectrics by atomic-layer deposition
Anri Nakajima, Takashi Yoshimoto, Toshirou Kidera et al. · Applied Physics Letters · 2001 · 55 citations · Full text
Engineering, Materials Engineering, Materials Science +17
Electron Spin Resonance in Discharge-Produced Silicon Nitride
Shin Yokoyama, Masataka Hirose, Yukio Ôsaka · Japanese Journal of Applied Physics · 1981 · 54 citations
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