Shinobu Saito

A novel BEOL transistor (BETr) with InGaZnO embedded in Cu-interconnects for on-chip high voltage I/Os in standard CMOS LSIs

K. Kaneko, Naoya Inoue, Shinobu Saito et al. · Symposium on VLSI Technology · 2011 · 32 citations

Engineering, Computer Engineering, Electrical Engineering +17

Mechanical Property Control of Low-k Dielectrics for Diminishing Chemical Mechanical Polishing (CMP)-Related Defects in Cu-Damascene Interconnects

K. Hijioka, Fuminori Ito, M. Tagami et al. · Japanese Journal of Applied Physics · 2004 · 21 citations

Natural Sciences, Materials Engineering, Materials Science +15

Effects of the Metallurgical Properties of Upper Cu Film on Stress-Induced Voiding (SIV) in Cu Dual-Damascene Interconnects

Mari Abe, N. Furutake, Shinobu Saito et al. · Japanese Journal of Applied Physics · 2005 · 10 citations

Natural Sciences, Materials Engineering, Materials Science +17