Concepedia

Tatehito Usui

TU

Statistics

Publications

4

Citations

65

H-Index

4

Active since

1982

Affiliations

Hitachi (Japan)(Current)

Hiroshima University

Hitachi High-Tech (Japan)

Okayama University

Tatehito Usui is an author at Hitachi (Japan) specializing in plasma physics, applied physics, and engineering.

Top concepts

Publications per year

1982–2017

4

Publications

4

Measurement of Intensity and Polarization of HeI Forbidden Lines for Diagnostics of Electric Field in a Plasma

Ken Takiyama, Tatehito Usui, Yositomo Kamiura et al. · Japanese Journal of Applied Physics · 1986 · 24 citations

, , +16

Forbidden Transitions in Helium and Lithium Due to Fluctuating Electric Fields for Plasma Diagnostics

Ken Kawasaki, Tatehito Usui, Toshiatsu Oda · Journal of the Physical Society of Japan · 1982 · 16 citations

, , +19

Relationship between formation of surface-reaction layers and flux of dissociated species in C4F8/Ar plasma for SiO2 etching using pulsed-microwave plasma

Miyako Matsui, Tatehito Usui, Hisao Yasunami et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2016 · 14 citations

, , +18

Effect of plasma dissociation on fluorocarbon layers formed under C<sub>4</sub>F<sub>8</sub>/Ar pulsed plasma for SiO<sub>2</sub>etching

Miyako Matsui, Tatehito Usui, Tetsuo Ono · Japanese Journal of Applied Physics · 2017 · 11 citations

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