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Hisao Yasunami

HY

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Publications

1

Citations

14

H-Index

1

Active since

2016

Affiliations

Hitachi High-Tech (Japan)(Current)

Hisao Yasunami is an author at Hitachi High-Tech (Japan) specializing in chemical engineering, materials engineering, and integrated circuits.

Top concepts

Publications per year

2016–2016

1

Publications

1

Relationship between formation of surface-reaction layers and flux of dissociated species in C4F8/Ar plasma for SiO2 etching using pulsed-microwave plasma

Miyako Matsui, Tatehito Usui, Hisao Yasunami et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2016 · 14 citations

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