Statistics
Publications
4
Citations
81
H-Index
4
Active since
2013
Affiliations
KLA (United States)(Current)
Sathish Veeraraghavan is an author at KLA (United States) specializing in engineering, manufacturing engineering, and semiconductor devices.
Publications per year
2013–2015
4
4
Characterization of wafer geometry and overlay error on silicon wafers with nonuniform stress
Timothy A. Brunner, Vinayan C. Menon, Cheuk Wun Wong et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 47 citations · Full text
Engineering, Manufacturing Engineering, Manufacturing Processes +13
Lithography overlay control improvement using patterned wafer geometry for sub-22nm technology nodes
Joel Peterson, Gary Rusk, Sathish Veeraraghavan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 12 citations
Engineering, Manufacturing Engineering, Manufacturing Processes +13
Algorithmic content generation for products
Chandra Khatri, Suman Voleti, Sathish Veeraraghavan et al. · 2015 · 10 citations
1–4 of 4