A. Benedetti

Diffusion, activation, and recrystallization of boron implanted in preamorphized and crystalline germanium

A. Satta, Eddy Simoen, Trudo Clarysse et al. · Applied Physics Letters · 2005 · 137 citations

Materials Science, Crystalline Germanium, Boron Nitride +8

Ion-implantation issues in the formation of shallow junctions in germanium

Eddy Simoen, A. Satta, A. D’Amore et al. · Materials Science in Semiconductor Processing · 2006 · 112 citations

Ion Implantation, Physics, Applied Physics +3

Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy

Vincent Senez, A. Armigliato, Ingrid De Wolf et al. · Journal of Applied Physics · 2003 · 98 citations · Full text

Engineering, Silicon Microstructures, Mechanical Engineering +20

P implantation doping of Ge: Diffusion, activation, and recrystallization

A. Satta, Tom Janssens, Trudo Clarysse et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 96 citations

Materials Engineering, Materials Science, Ion Implantation +12

Shallow Junction Ion Implantation in Ge and Associated Defect Control

A. Satta, Eddy Simoen, Tom Janssens et al. · Journal of The Electrochemical Society · 2006 · 79 citations

Materials Science, Electrical Engineering, Ion Implantation +14