Concepedia

Ivan Zyulkov

IZ

4

Publications

85

Citations

4

H-Index

2016

Active since

Affiliations

KU Leuven(Current)

IMEC

Ivan Zyulkov is an author at KU Leuven specializing in applied physics, engineering, and surface science.

Top concepts

EngineeringApplied PhysicsPhysicsHydrogenChemistrySpectroscopyAtomic PhysicsInstrumentationNanoelectronicsSurface Science

Publications per year

2016–2020

4

Publications

4

Use of high order precursors for manufacturing gate all around devices

Andriy Hikavyy, Ivan Zyulkov, Hans Mertens et al. · Materials Science in Semiconductor Processing · 2016 · 33 citations · Full text

Electrical Engineering, Physical Design (Electronics), Engineering +9

Area-Selective ALD of Ru on Nanometer-Scale Cu Lines through Dimerization of Amino-Functionalized Alkoxy Silane Passivation Films

Ivan Zyulkov, Viraj Madhiwala, Matthew Snelgrove et al. · ACS Applied Materials & Interfaces · 2020 · 30 citations

High sensitivity Rutherford backscattering spectrometry using multidetector digital pulse processing

G. Laricchiuta, Wilfried Vandervorst, Ivan Zyulkov et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2018 · 11 citations

Engineering, Atomic Emission Spectroscopy, Ion Beam Instrumentation +16

Area-selective Ru ALD by amorphous carbon modification using H plasma: from atomistic modeling to full wafer process integration

Ivan Zyulkov, Mikhail Krishtab, D. G. Voloshin et al. · Materials Advances · 2020 · 11 citations · Full text

Materials Engineering, Materials Science, Simultaneous Ald Inhibition +11

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