Toshitsugu Ueda

Theory to Predict Etching Shapes in Quartz Crystal and Its Application to Design Devices

Toshitsugu Ueda, Fusao Kohsaka, Toshio Iino et al. · Transactions of the Society of Instrument and Control Engineers · 1987 · 35 citations · Full text

Engineering, Mechanical Engineering, Predict Etching Shapes +19

Wet Etched High Aspect Ratio Microstructures on Quartz for MEMS Applications

Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo et al. · IEEJ Transactions on Sensors and Micromachines · 2007 · 30 citations · Full text

Engineering, Microelectromechanical Systems, Biomedical Engineering +16

Improved bi-layer lift-off process for MEMS applications

Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo et al. · Microelectronic Engineering · 2008 · 30 citations

Electrical Engineering, Bi-layer Lift-off Process, Engineering +3

Experiment and numerical analysis for edge and corner bonded PoP bottom package assemblies under four-point bending

Hongbin Shi, Fa Xing, Toshitsugu Ueda · Microelectronics Reliability · 2011 · 28 citations

Numerical Analysis, Advanced Packaging, Engineering +8

NIR Spectrum Analysis of Natural Gas Based on Hollow-Core Photonic Bandgap Fiber

Xuefeng Li, Jinxing Liang, Shuo Lin et al. · IEEE Sensors Journal · 2012 · 26 citations

Photonics, Engineering, Infrared Sensor +15