Fusao Kohsaka

Precision force transducers using mechanical resonators

Tetsuzo Ueda, Fusao Kohsaka, E. Ogita · Measurement · 1985 · 46 citations

Engineering, Precision Force Transducers, Mechanical Engineering +5

Temperature Sensor Using Quartz Tuning Fork Resonator

Tetsuzo Ueda, Fusao Kohsaka, Toshio Iino et al. · 1986 · 39 citations

Engineering, Temperature Sensor, Sensor Technology +16

Theory to Predict Etching Shapes in Quartz Crystal and Its Application to Design Devices

Toshitsugu Ueda, Fusao Kohsaka, Toshio Iino et al. · Transactions of the Society of Instrument and Control Engineers · 1987 · 35 citations · Full text

Engineering, Mechanical Engineering, Predict Etching Shapes +19

Wet Etched High Aspect Ratio Microstructures on Quartz for MEMS Applications

Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo et al. · IEEJ Transactions on Sensors and Micromachines · 2007 · 30 citations · Full text

Engineering, Microelectromechanical Systems, Biomedical Engineering +16

Improved bi-layer lift-off process for MEMS applications

Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo et al. · Microelectronic Engineering · 2008 · 30 citations

Electrical Engineering, Bi-layer Lift-off Process, Engineering +3