Woei Cherng Wu

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Publications

Citations

171

H-Index

Active since

2005

Affiliations

National Yang Ming Chiao Tung University(Current)

Chang Gung University

Nanya Technology (Taiwan)

Institute of Electrophysics

Woei Cherng Wu is an author at National Yang Ming Chiao Tung University specializing in materials science, gate dielectrics, and electronic materials.

ORCID

Publications per year

2005–2008

Publications

Suppression of interfacial reaction for HfO2 on silicon by pre-CF4 plasma treatment

Chao‐Sung Lai, Woei Cherng Wu, Tien Sheng Chao et al. · Applied Physics Letters · 2006 · 33 citations

Engineering, Materials Engineering, Materials Science +17

Characterization of CF4-plasma fluorinated HfO2 gate dielectrics with TaN metal gate

Chao‐Sung Lai, Woei Cherng Wu, Jer‐Chyi Wang et al. · Applied Physics Letters · 2005 · 32 citations

Natural Sciences, Materials Engineering, Materials Science +14

Carrier Transportation Mechanism of the $\hbox{TaN}/ \hbox{HfO}_{2}/\hbox{IL}/\hbox{Si}$ Structure With Silicon Surface Fluorine Implantation

Woei Cherng Wu, Chao‐Sung Lai, Tzu-Ming Wang et al. · IEEE Transactions on Electron Devices · 2008 · 30 citations

Engineering, Electrical Engineering, Materials Science +17

High-Performance HfO[sub 2] Gate Dielectrics Fluorinated by Postdeposition CF[sub 4] Plasma Treatment

Woei Cherng Wu, Chao‐Sung Lai, Jer‐Chyi Wang et al. · Journal of The Electrochemical Society · 2007 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +17

Effects of Post CF<sub>4</sub> Plasma Treatment on the HfO<sub>2</sub> Thin Film

Chao‐Sung Lai, Woei Cherng Wu, Kung Ming Fan et al. · Japanese Journal of Applied Physics · 2005 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +15

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