Concepedia

Kung Ming Fan

KM

Statistics

Publications

3

Citations

47

H-Index

3

Active since

2005

Affiliations

Nanya Technology (Taiwan)(Current)

Chang Gung University

Kung Ming Fan is an author at Nanya Technology (Taiwan) specializing in materials engineering, materials science, and natural sciences.

Publications per year

2005–2008

3

Publications

3

Fluorine effects on the dipole structures of the Al2O3 thin films and characterization by spectroscopic ellipsometry

Chao‐Sung Lai, Kung Ming Fan, Hsing Kan Peng et al. · Applied Physics Letters · 2007 · 19 citations

, , +17

Effects of Post CF<sub>4</sub> Plasma Treatment on the HfO<sub>2</sub> Thin Film

Chao‐Sung Lai, Woei Cherng Wu, Kung Ming Fan et al. · Japanese Journal of Applied Physics · 2005 · 18 citations

, , +15

Improvements on Interface Reliability and Capacitance Dispersion of Fluorinated ALD-Al[sub 2]O[sub 3] Gate Dielectrics by CF[sub 4] Plasma Treatment

Kung Ming Fan, Chao‐Sung Lai, Hsing Kan Peng et al. · Journal of The Electrochemical Society · 2008 · 10 citations

, , +17

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