Concepedia

Liangyu Lu

LL

Statistics

Publications

3

Citations

44

H-Index

3

Active since

2022

Affiliations

Wuhan University(Current)

Liangyu Lu is an author at Wuhan University specializing in mems simulation, finite element simulation, and stiffness.

ORCID

Publications per year

2022–2024

3

Publications

3

A Miniaturized Piezoelectric MEMS Accelerometer with Polygon Topological Cantilever Structure

Chaoxiang Yang, Bohao Hu, Liangyu Lu et al. · Micromachines · 2022 · 20 citations · Full text

, , +17

A ScAlN-Based Piezoelectric MEMS Microphone With Sector-Connected Cantilevers

Bohao Hu, Wenjuan Liu, Chaoxiang Yang et al. · Journal of Microelectromechanical Systems · 2023 · 14 citations

, , +17

A Sc<sub>0.096</sub>Al<sub>0.904</sub>N-Based Bimorph Piezoelectric MEMS Microphone Using 3 × 3 Circular Diaphragms

Bohao Hu, Wenjuan Liu, Yan Liu et al. · IEEE Transactions on Electron Devices · 2024 · 10 citations

, , +13

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