Wenjuan Liu

Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications

Yang Zou, Chao Gao, Jie Zhou et al. · Microsystems & Nanoengineering · 2022 · 104 citations · Full text

A Novel Trapezoidal ScAlN/AlN-Based MEMS Piezoelectric Accelerometer

Bohao Hu, Yan Liu, Binghui Lin et al. · IEEE Sensors Journal · 2021 · 41 citations

Electrical Engineering, Engineering, Vibrations +14

Design, Fabrication, and Characterization of Aluminum Scandium Nitride-Based Thin Film Bulk Acoustic Wave Filter

Yang Zou, Yao Cai, Chao Gao et al. · Journal of Microelectromechanical Systems · 2023 · 34 citations

Materials Science, Materials Engineering, Aluminium Nitride +9

3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI

Wenjuan Liu, Leming He, Xubo Wang et al. · Sensors · 2019 · 33 citations · Full text

Aluminium Nitride, Aeroacoustics, Engineering +21

Design and Performance of ScAlN/AlN Trapezoidal Cantilever-Based MEMS Piezoelectric Energy Harvesters

Yan Liu, Bohao Hu, Yao Cai et al. · IEEE Transactions on Electron Devices · 2021 · 32 citations

Electrical Engineering, Energy Harvesting, Engineering +12