Feng Gao

Microscopic silicon-based lateral high-aspect-ratio structures for thin film conformality analysis

Feng Gao, Sanna Arpiainen, Riikka L. Puurunen · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2014 · 62 citations

Natural Sciences, Materials Engineering, Materials Science +16

Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2O3 extracted from their impact on film conformality

Karsten Arts, Vincent Vandalon, Riikka L. Puurunen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2019 · 54 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Smooth silicon sidewall etching for waveguide structures using a modified Bosch process

Feng Gao, Sami Ylinen, Markku Kainlauri et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 45 citations

Engineering, Electrical Engineering, Electronic Materials +16

Nucleation and Conformality of Iridium and Iridium Oxide Thin Films Grown by Atomic Layer Deposition

Miika Mattinen, Jani Hämäläinen, Feng Gao et al. · Langmuir · 2016 · 44 citations

Natural Sciences, Materials Engineering, Materials Science +17

Reverse-Offset Printing of Polymer Resist Ink for Micrometer-Level Patterning of Metal and Metal-Oxide Layers

Asko Sneck, Henri Ailas, Feng Gao et al. · ACS Applied Materials & Interfaces · 2021 · 27 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16