Feng Gao

Microscopic silicon-based lateral high-aspect-ratio structures for thin film conformality analysis

Feng Gao, Sanna Arpiainen, Riikka L. Puurunen · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2014 · 61 citations

Materials Science, Wafer Scale Processing, Engineering +15

Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2O3 extracted from their impact on film conformality

Karsten Arts, Vincent Vandalon, Riikka L. Puurunen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2019 · 52 citations · Full text

Aluminium Nitride, Engineering, Chemistry +17

Smooth silicon sidewall etching for waveguide structures using a modified Bosch process

Feng Gao, Sami Ylinen, Markku Kainlauri et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 44 citations

Engineering, Modified Bosch Process, Sidewall Etching +12

Nucleation and Conformality of Iridium and Iridium Oxide Thin Films Grown by Atomic Layer Deposition

Miika Mattinen, Jani Hämäläinen, Feng Gao et al. · Langmuir · 2016 · 43 citations

Reverse-Offset Printing of Polymer Resist Ink for Micrometer-Level Patterning of Metal and Metal-Oxide Layers

Asko Sneck, Henri Ailas, Feng Gao et al. · ACS Applied Materials & Interfaces · 2021 · 26 citations · Full text