K.T. Huang

Sub-7-nm textured ZrO2 with giant ferroelectricity

K.T. Huang, Sheng‐Han Yi, Yu‐Sen Jiang et al. · Acta Materialia · 2020 · 50 citations

Natural Sciences, Materials Engineering, Materials Science +12

Atomic layer deposition of sub-10 nm high-K gate dielectrics on top-gated MoS2 transistors without surface functionalization

Po-Hsien Cheng, K.T. Huang, Hsin-Chih Lin et al. · Applied Surface Science · 2018 · 32 citations

Engineering, Electrical Engineering, Materials Science +17

Low-temperature crystallization and paraelectric–ferroelectric phase transformation in nanoscale ZrO₂ thin films induced by atomic layer plasma treatment

Sheng‐Han Yi, K.T. Huang, Hsin-Chih Lin et al. · Journal of Materials Chemistry C · 2020 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +17

Leakage current lowering and film densification of ZrO2 high-k gate dielectrics by layer-by-layer, in-situ atomic layer hydrogen bombardment

K.T. Huang, Teng-Jan Chang, Chunyuan Wang et al. · Materials Science in Semiconductor Processing · 2020 · 25 citations

Natural Sciences, Materials Engineering, Materials Science +15

Sub-nanometer heating depth of atomic layer annealing

Wei-Hao Lee, Wei-Chung Kao, Yu‐Tung Yin et al. · Applied Surface Science · 2020 · 24 citations

Natural Sciences, Materials Science, Physics +11