Wei-Hao Lee

Low-temperature atomic layer epitaxy of AlN ultrathin films by layer-by-layer, in-situ atomic layer annealing

Huan-Yu Shih, Wei-Hao Lee, Wei-Chung Kao et al. · Scientific Reports · 2017 · 110 citations · Full text

Nanoscale GaN Epilayer Grown by Atomic Layer Annealing and Epitaxy at Low Temperature

Wei-Hao Lee, Yu‐Tung Yin, Po-Hsien Cheng et al. · ACS Sustainable Chemistry & Engineering · 2018 · 37 citations

Materials Science, Semiconductors, Electrical Engineering +14

High-<i>K</i> Gate Dielectrics Treated with <i>in Situ</i> Atomic Layer Bombardment

Teng-Jan Chang, Wei-Hao Lee, Chin-I Wang et al. · ACS Applied Electronic Materials · 2019 · 31 citations

Engineering, Vacuum Device, Chemical Deposition +16

AlN epitaxy on SiC by low-temperature atomic layer deposition <i>via</i> layer-by-layer, <i>in situ</i> atomic layer annealing

Wei-Chung Kao, Wei-Hao Lee, Sheng-Han Yi et al. · RSC Advances · 2019 · 24 citations · Full text

Sub-nanometer heating depth of atomic layer annealing

Wei-Hao Lee, Wei-Chung Kao, Yu‐Tung Yin et al. · Applied Surface Science · 2020 · 23 citations

Sub-nanometer Heating Depth, Engineering, Physics +6