V. K. Smirnov

Publications

144

Citations

H-Index

1999

Active since

Affiliations

Institute of Microelectronics Technology and High Purity Materials(Current)

V. K. Smirnov is an author at Institute of Microelectronics Technology and High Purity Materials specializing in applied physics, engineering, and physics.

Top concepts

EngineeringApplied PhysicsPhysicsSurface ScienceMaterial ScienceMicroelectronicsCrystalline DefectsMechanicsHydrodynamicsAtomic Physics

Publications per year

1999–2003

Publications

Technology for nanoperiodic doping of a metal oxide semiconductor field-effect transistor channel using a self-forming wave-ordered structure

V. K. Smirnov, D. S. Kibalov, Oleg M. Orlov et al. · Nanotechnology · 2003 · 51 citations

Engineering, Integrated Circuits, Semiconductor Device +16

Wave-ordered structures formed on SOI wafers by reactive ion beams

V. K. Smirnov, D. S. Kibalov, S. A. Krivelevich et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 38 citations

Ion Implantation, Engineering, Physics +7

Angular dependences of surface composition, sputtering and ripple formation on silicon under N2+ ion bombardment

P. A. Lepshin, V. K. Smirnov · Vacuum · 2000 · 23 citations

Materials Science, Ion Implantation, N2+ Ion Bombardment +11

Hydrodynamic model of wave-ordered structures formed by ion bombardment of solids

Alexander Rudy, V. K. Smirnov · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 17 citations

Engineering, Detonation Phenomenon, Physics +13

Formation of thin silicon nitride layers on Si by low energy N2+ ion bombardment

Evgenij Potapov, V. K. Smirnov, A.B. Danilin · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 15 citations

Materials Science, Ion Implantation, Engineering +7

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