P. A. Lepshin

Publications

Citations

H-Index

1999

Active since

Affiliations

Institute of Microelectronics Technology and High Purity Materials(Current)

P. A. Lepshin is an author at Institute of Microelectronics Technology and High Purity Materials specializing in microelectronics, applied physics, and engineering.

Top concepts

EngineeringApplied PhysicsMicroelectronicsPhysicsAtomic PhysicsSurface ScienceMaterial ScienceCrystalline Defects

Publications per year

1999–2000

Publications

Wave-ordered structures formed on SOI wafers by reactive ion beams

V. K. Smirnov, D. S. Kibalov, S. A. Krivelevich et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 38 citations

Ion Implantation, Engineering, Physics +7

Angular dependences of surface composition, sputtering and ripple formation on silicon under N2+ ion bombardment

P. A. Lepshin, V. K. Smirnov · Vacuum · 2000 · 23 citations

Materials Science, Ion Implantation, N2+ Ion Bombardment +11

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