Hye-Keun Oh

Eco-friendly photolithography using water-developable pure silk fibroin

Joonhan Park, Sunggyu Lee, Benedetto Marelli et al. · RSC Advances · 2016 · 54 citations

Materials Science, Engineering, Beam Lithography +11

Molecular Modeling of EUV Photoresist Revealing the Effect of Chain Conformation on Line-Edge Roughness Formation

Juhae Park, Sunggyu Lee, Yannick Vesters et al. · Polymers · 2019 · 23 citations · Full text

Vibrational Predissociation Dynamics of p-Difluorobenzene-N2 Complexes. Comparison with p-Difluorobenzene-Ar

Brian D. Gilbert, C. S. Parmenter, Hye-Keun Oh · The Journal of Physical Chemistry · 1995 · 22 citations

Molecular Sciences, Engineering, Physicochemical Analysis +13

Mechanical deflection of a free-standing pellicle for extreme ultraviolet lithography

Eun‐Sang Park, Zahid Hussain Shamsi, Jiwon Kim et al. · Microelectronic Engineering · 2015 · 17 citations

Materials Science, Extreme Ultraviolet Lithography, Engineering +11

Resist distribution effect of spin coating

Sang-Kon Kim, Ji-Yong Yoo, Hye-Keun Oh · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 16 citations

Engineering, Magnetic Resonance, Thin Film Process Technology +17