Publication | Closed Access
Mechanical deflection of a free-standing pellicle for extreme ultraviolet lithography
17
Citations
15
References
2015
Year
Materials ScienceExtreme Ultraviolet LithographyEngineeringElectron-beam LithographyMicrofabricationMechanicsTarget FabricationMechanical EngineeringApplied PhysicsFabrication TechniqueBeam LithographySoft Matter3D PrintingNanolithography Method
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