Concepedia

Khanh B. Nguyen

KB

4

Publications

117

Citations

4

H-Index

1993

Active since

Affiliations

Lawrence Berkeley National Laboratory(Current)

Khanh B. Nguyen is an author at Lawrence Berkeley National Laboratory specializing in applied physics, engineering, and microfabrication.

Top concepts

EngineeringApplied PhysicsInstrumentationOptoelectronicsMicrofabricationHealthPhysicsPhotonicsMicroscopySpectroscopy

Publications per year

1993–1995

4

Publications

4

Tarnishing of Mo/Si multilayer x-ray mirrors

J. H. Underwood, Eric M. Gullikson, Khanh B. Nguyen · Applied Optics · 1993 · 43 citations

Undulator radiation for at-wavelength interferometry of optics for extreme-ultraviolet lithography

David Attwood, Gary E. Sommargren, R. Beguiristain et al. · Applied Optics · 1993 · 43 citations

Coherent Power, Short Wavelength Optic, Optical Materials +18

Recent results in the development of an integrated EUVL laboratory tool

Daniel A. Tichenor, Glenn D. Kubiak, Steven J. Haney et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 16 citations

Short Wavelength Optic, Engineering, Electron-beam Lithography +22

<title>Effects of absorber topography and multilayer coating defects on reflective masks for soft x-ray/EUV projection lithography</title>

Khanh B. Nguyen, Alfred K. K. Wong, Andrew R. Neureuther et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 15 citations

Engineering, Electron-beam Lithography, Multilayer Coating +16

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