Concepedia
Statistics
Publications
4
Citations
138
H-Index
Active since
1993
Affiliations
Lawrence Berkeley National Laboratory(Current)
University of California, Berkeley
Lawrence Livermore National Laboratory
R. Beguiristain is an author at Lawrence Berkeley National Laboratory specializing in optics, natural sciences, and photonics.
Publications per year
1993–1999
Tunable coherent radiation in the soft X-ray and extreme ultraviolet spectral regions
David Attwood, Patrick Naulleau, Kenneth A. Goldberg et al. · IEEE Journal of Quantum Electronics · 1999 · 52 citations
Natural Sciences, Physics, Optics +12
Undulator radiation for at-wavelength interferometry of optics for extreme-ultraviolet lithography
David Attwood, Gary E. Sommargren, R. Beguiristain et al. · Applied Optics · 1993 · 43 citations
Natural Sciences, Materials Engineering, Materials Science +12
A new optical design method and its application to an extreme ultraviolet varied line spacing plane grating monochromator
Masato Koike, R. Beguiristain, J. H. Underwood et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 1994 · 27 citations
Natural Sciences, Materials Science, Optical Materials +8
Progress towards λ/20 extreme ultraviolet interferometry
Kenneth A. Goldberg, R. Beguiristain, Jeffrey Bokor et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 16 citations
Natural Sciences, Physics, Metrology +14
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