Concepedia

R. Beguiristain

RB

4

Publications

138

Citations

4

H-Index

1993

Active since

Affiliations

Lawrence Berkeley National Laboratory(Current)

University of California, Berkeley

Lawrence Livermore National Laboratory

R. Beguiristain is an author at Lawrence Berkeley National Laboratory specializing in optical properties, engineering, and photonics.

Top concepts

EngineeringOptical PropertiesPhotonicsPhysicsInterferometryApplied PhysicsInstrumentationOptical SystemsOptoelectronicsOptical Materials

Publications per year

1993–1999

4

Publications

4

Tunable coherent radiation in the soft X-ray and extreme ultraviolet spectral regions

David Attwood, Patrick Naulleau, Kenneth A. Goldberg et al. · IEEE Journal of Quantum Electronics · 1999 · 52 citations

X-ray Spectroscopy, Engineering, Synchrotron Radiation Source +18

Undulator radiation for at-wavelength interferometry of optics for extreme-ultraviolet lithography

David Attwood, Gary E. Sommargren, R. Beguiristain et al. · Applied Optics · 1993 · 43 citations

Coherent Power, Short Wavelength Optic, Optical Materials +18

A new optical design method and its application to an extreme ultraviolet varied line spacing plane grating monochromator

Masato Koike, R. Beguiristain, J. H. Underwood et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 1994 · 27 citations

Photonics, Optical Materials, Engineering +7

Progress towards λ/20 extreme ultraviolet interferometry

Kenneth A. Goldberg, R. Beguiristain, Jeffrey Bokor et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 16 citations

Engineering, Wave Front, Microscopy +21

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