Xiaomeng Liu

Tailoring spatial entropy in extreme ultraviolet focused beams for multispectral ptychography

Lars Loetgering, Xiaomeng Liu, A. C. C. de Beurs et al. · Optica · 2020 · 56 citations · Full text

Optical Materials, Engineering, Microscopy +19

Photochemical conversion of tin-oxo cage compounds studied using hard x-ray photoelectron spectroscopy

Yù Zhang, Jarich Haitjema, Xiaomeng Liu et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2017 · 54 citations · Full text

Materials Science, Inorganic Chemistry, Extreme Ultraviolet Lithography +15

High-resolution wavefront sensing and aberration analysis of multi-spectral extreme ultraviolet beams

Mengqi Du, Xiaomeng Liu, Antonios Pelekanidis et al. · Optica · 2023 · 33 citations · Full text

Engineering, Microscopy, Wave Optic +22

Diffractive shear interferometry for extreme ultraviolet high-resolution lensless imaging

G. S. Matthijs Jansen, A. C. C. de Beurs, Xiaomeng Liu et al. · Optics Express · 2018 · 23 citations · Full text

Engineering, Microscopy, Interferometry +16

Aberration calibration and correction with nano-scatterers in digital holographic microscopy for semiconductor metrology

Christos Messinis, Theodorus T. M. van Schaijk, Nitesh Pandey et al. · Optics Express · 2021 · 22 citations · Full text

Holography, Engineering, Microscopy +22