Tsunetaka Sumomogi

Micromachining of metal surfaces by scanning probe microscope

Tsunetaka Sumomogi, Takatsugu Endo, Kaizo Kuwahara et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 43 citations

Engineering, Microscopy, Mechanical Engineering +22

Nanoscale layer removal of metal surfaces by scanning probe microscope scratching

Tsunetaka Sumomogi, Tsutomu Endo, Kaizo Kuwahara et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 37 citations

Probe Microscope, Engineering, Microscopy +28

Crystal Direction of CdS Thin Film Produced by Laser Ablation

Hisashi Sakai, T. Tamaru, Tsunetaka Sumomogi et al. · Japanese Journal of Applied Physics · 1998 · 33 citations

Materials Science, Engineering, Physics +12

Evaluation of surface and subsurface cracks on nano-scale machined brittle materials by scanning force microscope and scanning laser microscope

Masayoshi Nakamura, Tsunetaka Sumomogi, Toshiro Endo · Surface and Coatings Technology · 2003 · 32 citations

Materials Science, Engineering, Force Microscope +12

Internal stress in aluminium oxide, titanium carbide and copper films obtained by planar magnetron sputtering

Kaizo Kuwahara, Tsunetaka Sumomogi, Mitsunori Kondo · Thin Solid Films · 1981 · 22 citations

Materials Engineering, Materials Science, Planar Magnetron +10