Kaizo Kuwahara

Micromachining of metal surfaces by scanning probe microscope

Tsunetaka Sumomogi, Takatsugu Endo, Kaizo Kuwahara et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 44 citations

Natural Sciences, Materials Engineering, Materials Science +8

Nanoscale layer removal of metal surfaces by scanning probe microscope scratching

Tsunetaka Sumomogi, Tsutomu Endo, Kaizo Kuwahara et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 37 citations

Engineering, Materials Engineering, Materials Science +13

Internal stress in aluminium oxide, titanium carbide and copper films obtained by planar magnetron sputtering

Kaizo Kuwahara, Tsunetaka Sumomogi, Mitsunori Kondo · Thin Solid Films · 1981 · 22 citations

Natural Sciences, Materials Engineering, Materials Science +17

Resistivity anisotropy of nickel films induced by oblique incidence sputter deposition

Kaizo Kuwahara, Sukehiro Shinzato · Thin Solid Films · 1988 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +16

Influence of atmosphere humidity on tribological properties in scanning probe microscope observation

Tsunetaka Sumomogi, Katsunori HIEDA, Takatsugu Endo et al. · Applied Physics A · 1998 · 17 citations

Engineering, Materials Science, Mechanical Engineering +14