2
Publications
29
Citations
2
H-Index
1982
Active since
Affiliations
Hiroshima Institute of Technology(Current)
Sukehiro Shinzato is an author at Hiroshima Institute of Technology specializing in materials engineering, applied physics, and engineering.
Top concepts
Thin FilmsEngineeringApplied PhysicsMaterial ScienceMaterials EngineeringSurface Science
Publications per year
1982–1988
2
2
Internal stress in sputter-deposited Al2O3 films
Sukehiro Shinzato, Tsunetaka Sumomogi, Shigeo Kofune et al. · Thin Solid Films · 1982 · 11 citations
Materials Science, Materials Engineering, Aluminium Nitride +6
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1–2 of 2