Shigeo Kofune is an author at Hiroshima University specializing in engineering, materials engineering, and thin films.
Publications per year
1982–1982
1
1
Internal stress in sputter-deposited Al2O3 films
Sukehiro Shinzato, Tsunetaka Sumomogi, Shigeo Kofune et al. · Thin Solid Films · 1982 · 11 citations
Materials Science, Materials Engineering, Aluminium Nitride +6
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