Concepedia
Statistics
Publications
8
Citations
179
H-Index
Active since
1986
Affiliations
Michigan State University(Current)
University of Michigan
M. Dahimene is an author at Michigan State University specializing in engineering, electrical engineering, and physics.
Top concepts
EngineeringElectrical EngineeringPhysicsApplied PhysicsPlasma ConfinementPulse PowerPlasma TheoryPlasma PhysicsInstrumentationMicroelectronics
Publications per year
1986–1998
The experimental test of a microwave ion beam source in oxygen
J. Asmussen, M. Dahimene · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 39 citations
Engineering, Electrodeless Ion Source, Plasma Science +20
Plasma etching with a microwave cavity plasma disk source
Jeffrey Hopwood, M. Dahimene, D.K. Reinhard et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 32 citations
Electrical Engineering, Crystalline Silicon, Engineering +10
Characterization of the etch rate non-uniformity in a magnetically enhanced reactive ion etcher
Melisa J. Buie, J. Pender, M. Dahimene · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 31 citations
Magnetism, Electrical Engineering, Engineering +14
The performance of a microwave ion source immersed in a multicusp static magnetic field
M. Dahimene, J. Asmussen · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 18 citations
Conventional Ion Sources, Engineering, Plasma Physics +19
Low power, 3.2-cm, efficient microwave electron cyclotron resonant ion source
L.J. Mahoney, M. Dahimene, J. Asmussen · Review of Scientific Instruments · 1988 · 18 citations
Engineering, Plasma Physics, Ion Beam Instrumentation +18
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