D.K. Reinhard

Charged particle densities and energy distributions in a multipolar electron cyclotron resonant plasma etching source

Jeffrey Hopwood, D.K. Reinhard, J. Asmussen · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 81 citations

Engineering, Plasma Physics, Ion Density +16

Improved microwave plasma cavity reactor for diamond synthesis at high-pressure and high power density

K. W. Hemawan, T.A. Grotjohn, D.K. Reinhard et al. · Diamond and Related Materials · 2010 · 58 citations

Diamond Synthesis, Engineering, High Power Density +6

Investigation of diamond deposition uniformity and quality for freestanding film and substrate applications

S. Zuo, M.K. Yaran, T.A. Grotjohn et al. · Diamond and Related Materials · 2008 · 55 citations

Materials Science, Diamond-like Carbon, Engineering +7

Multiple substrate microwave plasma-assisted chemical vapor deposition single crystal diamond synthesis

J. Asmussen, T.A. Grotjohn, Thomas Schuelke et al. · Applied Physics Letters · 2008 · 47 citations

Materials Science, Materials Engineering, Diamond-like Carbon +8

Investigation of mask selectivities and diamond etching using microwave plasma-assisted etching

Dzung T. Tran, C. Fansler, T.A. Grotjohn et al. · Diamond and Related Materials · 2010 · 44 citations

Electron-beam Lithography, Microfabrication, Mask Selectivities +3