D.K. Reinhard - Concepedia

Author

D.K. Reinhard

Michigan State University

Also Known As

D. K. Reinhard, D.K Reinhard, D.K. Reinhard, Donnie K. Reinhard

Publications

943

Citations

H-Index

Concepts

All Affiliations

Michigan State University Fraunhofer USA IBM (United States)Massachusetts Institute of Technology The King's College

About

D.K. Reinhard is an author at Michigan State University specializing in applied physics, engineering, and materials science.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	18	28	761
2	Applied Physics	18	28	761
3	Materials Science	15	15	411
4	Electrical Engineering	14	16	403
5	Materials Engineering	3	3	98

D.K. Reinhard

Publications

836

Citations

H-Index

Page 1

	Year	Citations
Charged particle densities and energy distributions in a multipolar electron cyclotron resonant plasma etching source Jeffrey Hopwood, D.K. Reinhard, J. Asmussen Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringPlasma PhysicsIon DensityIon Incidence EnergyEnergy Distributions	1990	81
Improved microwave plasma cavity reactor for diamond synthesis at high-pressure and high power density K. W. Hemawan, T.A. Grotjohn, D.K. Reinhard, Diamond and Related Materials Diamond SynthesisEngineeringHigh Power DensityApplied PhysicsFusion Power	2010	58
Investigation of diamond deposition uniformity and quality for freestanding film and substrate applications S. Zuo, M.K. Yaran, T.A. Grotjohn, Diamond and Related Materials Materials ScienceDiamond-like CarbonEngineeringDiamond Deposition UniformitySurface Science	2008	55
Multiple substrate microwave plasma-assisted chemical vapor deposition single crystal diamond synthesis J. Asmussen, T.A. Grotjohn, Thomas Schuelke, Applied Physics Letters Materials ScienceMaterials EngineeringDiamond-like CarbonDiamond SynthesisEngineering	2008	47
Investigation of mask selectivities and diamond etching using microwave plasma-assisted etching Dzung T. Tran, C. Fansler, T.A. Grotjohn, Diamond and Related Materials Electron-beam LithographyMicrofabricationMask SelectivitiesMicrowave Plasma-assisted EtchingPlasma Etching	2010	44
Electric field-dependent conductivity of polycrystalline diamond thin films Bohr-Ran Huang, D.K. Reinhard Applied Physics Letters Materials ScienceDiamond-like CarbonElectrical EngineeringEngineeringElectronic Conductors	1991	41
Low temperature oxidation of silicon using a microwave plasma disk source T. Roppel, D.K. Reinhard, J. Asmussen Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena New Reactor ConceptGrowth RatesEngineeringPlasma SciencePlasma Physics	1986	38
Plasma etching with a microwave cavity plasma disk source Jeffrey Hopwood, M. Dahimene, D.K. Reinhard, Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena Electrical EngineeringCrystalline SiliconEngineeringPlasma ElectronicsMicrofabrication	1988	32
An investigation of electromagnetic field patterns during microwave plasma diamond thin film deposition Jing Zhang, Bor-Luen Huang, D.K. Reinhard, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Electromagnetic Field PatternsDiamond-like CarbonElectrical EngineeringPlasma ElectronicsEngineering	1990	31
Effect of ultrahigh nucleation density on diamond growth at different growth rates and temperatures G. S. Yang, M. Aslam, Kuan-Chu Kuo, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringCrystal Growth TechnologyThin Film Process TechnologyChemical DepositionDiamond Film Deposition	1995	29

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