M.K. Yaran

Heavy phosphorus doping by epitaxial growth on the (111) diamond surface

T.A. Grotjohn, Dzung T. Tran, M.K. Yaran et al. · Diamond and Related Materials · 2014 · 71 citations

Materials Science, Engineering, Crystal Growth Technology +5

Investigation of diamond deposition uniformity and quality for freestanding film and substrate applications

S. Zuo, M.K. Yaran, T.A. Grotjohn et al. · Diamond and Related Materials · 2008 · 55 citations

Materials Science, Diamond-like Carbon, Engineering +7

Multiple substrate microwave plasma-assisted chemical vapor deposition single crystal diamond synthesis

J. Asmussen, T.A. Grotjohn, Thomas Schuelke et al. · Applied Physics Letters · 2008 · 47 citations

Materials Science, Materials Engineering, Diamond-like Carbon +8

Scaling the microwave plasma-assisted chemical vapor diamond deposition process to 150–200 mm substrates

David King, M.K. Yaran, Thomas Schuelke et al. · Diamond and Related Materials · 2008 · 24 citations

Materials Science, Engineering, Microfabrication +6

Fabrication and properties of ultranano, nano, and microcrystalline diamond membranes and sheets

D.K. Reinhard, T.A. Grotjohn, Michael Becker et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 24 citations

Nanosheet, Film Nucleation, Engineering +17