Nobutaka Magome

New imaging technique for 64M-DRAM

Naomasa Shiraishi, Shigeru Hirukawa, Yuichiro Takeuchi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1992 · 78 citations

Engineering, Microscopy, Optic Design +18

Hybrid Holographic Interferometer For Measuring Three-Dimensional Deformations

Suazou Nakadate, Nobutaka Magome, Toshio Honda et al. · Optical Engineering · 1981 · 25 citations

Holography, Engineering, Measurement +18

Double patterning requirements for optical lithography and prospects for optical extension without double patterning

Andrew J. Hazelton, Shinji Wakamoto, Shigeru Hirukawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 20 citations

Optical Materials, Engineering, Electron-beam Lithography +18

Development of aerial image based aberration measurement technique

Tsuneyuki Hagiwara, Naoto Kondo, Irihama Hiroshi et al. · Optical Microlithography XVIII · 2005 · 18 citations

Engineering, Optic Design, Optical Testing +23

<title>New alignment sensors for wafer stepper</title>

Kazuya Ota, Nobutaka Magome, Kenji Nishi · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1991 · 10 citations