Concepedia

M.J. Rack

MR

4

Publications

96

Citations

4

H-Index

1994

Active since

Affiliations

Arizona State University(Current)

M.J. Rack is an author at Arizona State University specializing in engineering, surface science, and applied physics.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMaterials EngineeringMicroelectronicsChemical EngineeringPhysicsChemistryCorrosion

Publications per year

1994–1999

4

Publications

4

25 nm chromium oxide lines by scanning tunneling lithography in air

Hyeon-Joo Song, M.J. Rack, K. Abugharbieh et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 36 citations · Full text

Engineering, Electron-beam Lithography, Microscopy +21

Initial oxidation of silicon (100): A unified chemical model for thin and thick oxide growth rates and interfacial structure

Thomas K. Whidden, P. Thanikasalam, M.J. Rack et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 28 citations

Engineering, Oxidation Resistance, Silicon On Insulator +18

Spectroscopy of a silicon quantum dot

M. Khoury, M.J. Rack, A. Gunther et al. · Applied Physics Letters · 1999 · 18 citations

Engineering, Semiconductor Device, Semiconductor Nanostructures +16

Formation of passivation and adhesion layers for Cu via nitridation of Cu-Ti in an ammonia ambient

Daniel Adams, T.L. Alford, S.A. Rafalski et al. · Materials Chemistry and Physics · 1996 · 14 citations

Materials Engineering, Materials Science, Chemical Engineering +8

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